THERMAL EVAPORATOR SLIDING DOOR TYPE (KSD-170) – KIYON

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KSD-170 is a sliding door type thermal evaporator system designed for direct integration with gloveboxes. It features a high-performance vacuum chamber, 10.5” touchscreen auto-control, and co-deposition capability, making it ideal for precise and efficient thin film deposition processes.

KSD-170

THERMAL EVAPORATOR SLIDING DOOR TYPE
Kiyon offers tailor-made system which is integrated with
Glovebox system through its own in-house designing

 

 

Basic Composition

Characteristic

  • Standard Chamber Size: 450 (W) x 450 (D) x 355/550 (H) / mm
  • Source: max. 170 x 170 / mm
  • Vacuum Capacity: 5.0 x 10-7 Torr
  • Chamber Working Pressure: Below than 5.0 x 10-6 Torr within 30minutes
  • Film Thickness Uniformity : <+/-3% within 156mm * 156mm Glass

Design

  • Sliding door type allows easy and safe sample put in/out
  • Isolated rear door for cleaning and easy maintenance

Configuration

  • Auto Control by 10.5“Touch Panel (Auto Pumping, Auto Venting, Auto System Shut Down)
  • Co-deposition available
  • Sample Rotation / heating or cooling option

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